Inventor

GALLIS MICHAIL A

US3 patents

⚠️ This page may combine multiple inventors who share the name “GALLIS MICHAIL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SANDIA CORP

1 patent

US7838083B1Nov 23, 2010

Ion beam assisted deposition of thermal barrier coatings

SANDIA CORP62 citations91

DELGADO GILDARDO R

1 patent

US9244368B2Jan 26, 2016

Particle control near reticle and optics using showerhead

DELGADO GILDARDO R3 citations69

KLA TENCOR CORP

1 patent

US9389180B2Jul 12, 2016

Methods and apparatus for use with extreme ultraviolet light having contamination protection

KLA TENCOR CORP2 citations60