Inventor
LIAO SI-WEN
TW10 patents
⚠️ This page may combine multiple inventors who share the name “LIAO SI-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
8 patentsUS10161041B2Dec 25, 2018
Thermal chemical vapor deposition system and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations79
US10867787B2Dec 15, 2020
Method for controlling plasma in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10864530B2Dec 15, 2020
Coating apparatus and method of forming coating film
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US9607873B2Mar 28, 2017
Apparatus and operation method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations69
US9573144B2Feb 21, 2017
Coating apparatus and method of forming coating film
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations69
US10395918B2Aug 27, 2019
Method and system for controlling plasma in semiconductor fabrication
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9324559B2Apr 26, 2016
Thin film deposition apparatus with multi chamber design and film deposition methods
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US10724140B2Jul 28, 2020
Thermal chemical vapor deposition system and operating method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47