Inventor
EDO TORU
JP8 patents
Patents
8 patentsUS10777404B2Sep 15, 2020
Substrate processing apparatus
SCREEN HOLDINGS CO LTD4 citations70
US9460944B2Oct 4, 2016
Substrate treating apparatus and method of treating substrate
SCREEN HOLDINGS CO LTD5 citations67
US11031235B2Jun 8, 2021
Substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations60
US10854479B2Dec 1, 2020
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD1 citations59
US12142502B2Nov 12, 2024
Processing condition selection method, substrate processing method, substrate product production method, processing condition selecting device, computer program, and storage medium
SCREEN HOLDINGS CO LTD0 citations51
US11764055B2Sep 19, 2023
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD0 citations49
US12176215B2Dec 24, 2024
Substrate processing apparatus, substrate processing method, and non-transitory computer-readable storage medium
SCREEN HOLDINGS CO LTD0 citations48
US9805938B2Oct 31, 2017
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations38