Inventor
BASOL BULENT MEHMET
US3 patents
Patents
3 patentsUS11699622B2Jul 11, 2023
Methods and apparatus for test pattern forming and film property measurement
ACTIVE LAYER PARAMETRICS INC1 citations57
US11289386B2Mar 29, 2022
Methods and apparatus for test pattern forming and film property measurement
ACTIVE LAYER PARAMETRICS INC1 citations57
US12313669B2May 27, 2025
Methods and tools for electrical property depth profiling using electro-etching
ACTIVE LAYER PARAMETRICS INC0 citations44