Inventor
TAKAGUCHI Katsura
JP3 patents
Patents
3 patentsUS11610754B2Mar 21, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations49
US11232929B2Jan 25, 2022
Method for determining irradiation conditions for charged particle beam device and charged particle beam device
HITACHI HIGH TECH CORP0 citations48
US11183362B2Nov 23, 2021
Charged particle beam apparatus and sample observation method using the same
HITACHI HIGH TECH CORP0 citations48