Inventor
YAMAMOTO TAKARI
JP7 patents
Patents
7 patentsUS10921773B2Feb 16, 2021
Temperature control method
TOKYO ELECTRON LTD2 citations71
US9885612B2Feb 6, 2018
Optical temperature sensor and method of controlling same
TOKYO ELECTRON LTD2 citations71
US10139290B2Nov 27, 2018
Optical temperature sensor and method for manufacturing optical temperature sensor
TOKYO ELECTRON LTD2 citations67
US12474686B2Nov 18, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations60
US11019285B2May 25, 2021
Calibration method of infrared camera and calibration system of infrared camera
TOKYO ELECTRON LTD0 citations56
US12142501B2Nov 12, 2024
Substrate processing system and temperature control method
TOKYO ELECTRON LTD0 citations49
US10139289B2Nov 27, 2018
Temperature measurement device, light emitting module and temperature measurement method
TOKYO ELECTRON LTD0 citations40