P

Inventor

AJI PRASHANT

US6 patents
⚠️ This page may combine multiple inventors who share the name “AJI PRASHANT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

3 patents
US12265377B2Apr 1, 2025

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations71
US11709477B2Jul 25, 2023

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations69
US12249525B1Mar 11, 2025

Using spectroscopic measurements for substrate temperature monitoring

APPLIED MATERIALS INC0 citations48

KLA TENCOR CORP

1 patent
US9747520B2Aug 29, 2017

Systems and methods for enhancing inspection sensitivity of an inspection tool

KLA TENCOR CORP5 citations69

NASSER-GHODSI MEHRAN

1 patent
US8765496B2Jul 1, 2014

Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis

NASSER-GHODSI MEHRAN4 citations69

LANGE STEVEN R

1 patent
US8705027B2Apr 22, 2014

Optical defect amplification for improved sensitivity on patterned layers

LANGE STEVEN R3 citations56