Inventor
MORI FUTOSHI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MORI FUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
4 patentsUS5646403AJul 8, 1997
Scanning electron microscope
NIKON CORP22 citations92
US6441884B1Aug 27, 2002
Projection exposure apparatus
NIKON CORP32 citations91
US6392741B1May 21, 2002
Projection exposure apparatus having active vibration isolator and method of controlling vibration by the active vibration isolator
NIKON CORP30 citations91
US5780853AJul 14, 1998
Scanning electron microscope
NIKON CORP13 citations73