Inventor
FUKAZAWA KAZUHIKO
JP28 patents
⚠️ This page may combine multiple inventors who share the name “FUKAZAWA KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
21 patentsUS7298471B2Nov 20, 2007
Surface inspection apparatus and surface inspection method
NIKON CORP12 citations92
US6693293B2Feb 17, 2004
Surface inspection apparatus using radiation or light
NIKON CORP22 citations92
US5646403AJul 8, 1997
Scanning electron microscope
NIKON CORP22 citations92
US8705034B2Apr 22, 2014
Evaluation device and evaluation method
NIKON CORP8 citations84
US7692780B2Apr 6, 2010
Surface inspecting apparatus
NIKON CORP8 citations84
US7372557B2May 13, 2008
Surface defect inspection apparatus and surface defect inspection method
NIKON CORP9 citations84
US6646735B2Nov 11, 2003
Surface inspection apparatus and surface inspection method
NIKON CORP14 citations84
US7369224B2May 6, 2008
Surface inspection apparatus, surface inspection method and exposure system
NIKON CORP13 citations83
US7643137B2Jan 5, 2010
Defect inspection apparatus, defect inspection method and method of inspecting hole pattern
NIKON CORP15 citations82
US7330042B2Feb 12, 2008
Substrate inspection system, substrate inspection method, and substrate inspection apparatus
NIKON CORP12 citations77
US10359367B2Jul 23, 2019
Inspection apparatus and inspection method
NIKON CORP4 citations73
US9964497B2May 8, 2018
Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device
NIKON CORP3 citations73
US6654113B2Nov 25, 2003
Surface inspection apparatus
NIKON CORP10 citations73
US5780853AJul 14, 1998
Scanning electron microscope
NIKON CORP13 citations73
US8687182B2Apr 1, 2014
Surface inspection apparatus and surface inspection method
NIKON CORP1 citations62
US7697139B2Apr 13, 2010
Surface inspection apparatus
NIKON CORP2 citations62
US7557912B2Jul 7, 2009
Defect inspection apparatus and defect inspection method
NIKON CORP4 citations62
US7990535B2Aug 2, 2011
Surface state detecting apparatus
NIKON CORP0 citations52
US7834993B2Nov 16, 2010
Surface inspection apparatus and surface inspection method
NIKON CORP0 citations52
US9322788B2Apr 26, 2016
Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device
NIKON CORP0 citations48
US10274835B2Apr 30, 2019
Evaluation method and device, processing method, and exposure system
NIKON CORP0 citations42
FUKAZAWA KAZUHIKO
6 patentsUS10352875B2Jul 16, 2019
Inspection apparatus, inspection method, exposure method, and method for manufacturing semiconductor device
FUKAZAWA KAZUHIKO2 citations71
US8945954B2Feb 3, 2015
Inspection method, inspection apparatus, exposure control method, exposure system, and semiconductor device
FUKAZAWA KAZUHIKO1 citations62
US8334977B2Dec 18, 2012
Evaluation device and evaluation method
FUKAZAWA KAZUHIKO4 citations62
US9240356B2Jan 19, 2016
Surface inspection apparatus, method for inspecting surface, exposure system, and method for producing semiconductor device
FUKAZAWA KAZUHIKO1 citations58
US8441627B2May 14, 2013
Surface inspection apparatus and surface inspection method
FUKAZAWA KAZUHIKO0 citations51
US8223328B2Jul 17, 2012
Surface inspecting apparatus and surface inspecting method
FUKAZAWA KAZUHIKO0 citations41