Inventor
KOHAMA YOSHIAKI
JP14 patents
⚠️ This page may combine multiple inventors who share the name “KOHAMA YOSHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
10 patentsUS6479819B1Nov 12, 2002
Object observation apparatus and object observation
NIKON CORP69 citations96
US6184526B1Feb 6, 2001
Apparatus and method for inspecting predetermined region on surface of specimen using electron beam
NIKON CORP120 citations96
US6518582B1Feb 11, 2003
Electron beam apparatus, and inspection instrument and inspection process thereof
NIKON CORP41 citations95
US6677587B2Jan 13, 2004
Electron beam apparatus, and inspection instrument and inspection process thereof
NIKON CORP17 citations92
US6670602B1Dec 30, 2003
Scanning device and scanning method
NIKON CORP21 citations92
US5646403AJul 8, 1997
Scanning electron microscope
NIKON CORP22 citations92
US5780853AJul 14, 1998
Scanning electron microscope
NIKON CORP13 citations73
US5466936ANov 14, 1995
Charged particle microscope
NIKON CORP19 citations72
US6958477B2Oct 25, 2005
Electron beam apparatus, and inspection instrument and inspection process thereof
NIKON CORP4 citations62
US6953944B2Oct 11, 2005
Scanning device and method including electric charge movement
NIKON CORP1 citations52