Inventor
CHONO ATSUSHI
JP10 patents
Patents
10 patentsUS6294059B1Sep 25, 2001
Substrate plating apparatus
EBARA CORP83 citations98
US6517689B1Feb 11, 2003
Plating device
EBARA CORP57 citations95
US6379520B1Apr 30, 2002
Plating apparatus
EBARA CORP40 citations92
US6365017B1Apr 2, 2002
Substrate plating device
EBARA CORP31 citations92
US6582580B1Jun 24, 2003
Substrate plating apparatus
EBARA CORP18 citations84
US6365020B1Apr 2, 2002
Wafer plating jig
EBARA CORP14 citations82
US6793794B2Sep 21, 2004
Substrate plating apparatus and method
EBARA CORP7 citations73
US6500317B1Dec 31, 2002
Plating apparatus for detecting the conductivity between plating contacts on a substrate
EBARA CORP8 citations72
US6929722B2Aug 16, 2005
Substrate plating apparatus
EBARA CORP2 citations63
USRE39123EJun 13, 2006
Plating apparatus
EBARA CORP3 citations62