Inventor
LYMBEROPOULOS DIMITRIS P
US3 patents
Patents
3 patentsUS6413867B1Jul 2, 2002
Film thickness control using spectral interferometry
APPLIED MATERIALS INC101 citations93
US6895293B2May 17, 2005
Fault detection and virtual sensor methods for tool fault monitoring
APPLIED MATERIALS INC19 citations89
US6589869B2Jul 8, 2003
Film thickness control using spectral interferometry
APPLIED MATERIALS INC26 citations88