Inventor
FUELBER CARSTEN
DE3 patents
Patents
3 patentsUS6686098B2Feb 3, 2004
Lithography method and lithography mask
INFINEON TECHNOLOGIES AG19 citations88
US7368390B2May 6, 2008
Photolithographic patterning process using a carbon hard mask layer of diamond-like hardness produced by a plasma-enhanced deposition process
INFINEON TECHNOLOGIES AG6 citations61
US6620559B2Sep 16, 2003
Photomask, method of lithographically structuring a photoresist layer with the photomask, and method of producing magnetic memory elements
INFINEON TECHNOLOGIES AG3 citations59