Inventor

ALDRICH NATHAN A

US2 patents

Patents

2 patents

US7322014B2Jan 22, 2008

Method of implementing polishing uniformity and modifying layout data

FREESCALE SEMICONDUCTOR INC5 citations71

US7146593B2Dec 5, 2006

Method of implementing polishing uniformity and modifying layout data

FREESCALE SEMICONDUCTOR INC10 citations71