Inventor
GEHRKE RALF
DE3 patents
Patents
3 patentsUS10948637B2Mar 16, 2021
Metrology system having an EUV optical unit
ZEISS CARL SMT GMBH0 citations58
US10394128B2Aug 27, 2019
Method for predicting at least one illumination parameter for evaluating an illumination setting
ZEISS CARL SMT GMBH0 citations48
US10078267B2Sep 18, 2018
Method for predicting at least one illumination parameter for evaluating an illumination setting
ZEISS CARL SMT GMBH1 citations48