Inventor

TARGUS RAINER

DE3 patents

⚠️ This page may combine multiple inventors who share the name “TARGUS RAINER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUSS MICROTEC LITHOGRAPHY GMBH

2 patents

US11504825B2Nov 22, 2022

Holding apparatus and method for holding a substrate

SUSS MICROTEC LITHOGRAPHY GMBH0 citations50

US11148258B2Oct 19, 2021

Holding apparatus and method for holding a substrate

SUSS MICROTEC LITHOGRAPHY GMBH0 citations50

SUESS MICROTEC LITHOGRAPHY

1 patent

US8353255B2Jan 15, 2013

Device for coating a substrate

SUESS MICROTEC LITHOGRAPHY0 citations29