Inventor

VAN KLEECK TODD J

US2 patents

Patents

2 patents

US11127678B2Sep 21, 2021

Dual dielectric layer for closing seam in air gap structure

GLOBALFOUNDRIES US INC6 citations79

US11705396B2Jul 18, 2023

Method to form air gap structure with dual dielectric layer

GLOBALFOUNDRIES US INC2 citations68