Inventor
GREGORY JOHN W
US15 patents
⚠️ This page may combine multiple inventors who share the name “GREGORY JOHN W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LSI LOGIC CORP
10 patentsUS6115233ASep 5, 2000
Integrated circuit device having a capacitor with the dielectric peripheral region being greater than the dielectric central region
LSI LOGIC CORP78 citations96
US5868608AFeb 9, 1999
Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
LSI LOGIC CORP77 citations96
US6528389B1Mar 4, 2003
Substrate planarization with a chemical mechanical polishing stop layer
LSI LOGIC CORP27 citations92
US6354908B2Mar 12, 2002
Method and apparatus for detecting a planarized outer layer of a semiconductor wafer with a confocal optical system
LSI LOGIC CORP30 citations92
US6284586B1Sep 4, 2001
Integrated circuit device and method of making the same using chemical mechanical polishing to remove material in two layers following masking
LSI LOGIC CORP29 citations92
US6241847B1Jun 5, 2001
Method and apparatus for detecting a polishing endpoint based upon infrared signals
LSI LOGIC CORP47 citations92
US6201253B1Mar 13, 2001
Method and apparatus for detecting a planarized outer layer of a semiconductor wafer with a confocal optical system
LSI LOGIC CORP36 citations92
US6168502B1Jan 2, 2001
Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus
LSI LOGIC CORP24 citations92
US6121147ASep 19, 2000
Apparatus and method of detecting a polishing endpoint layer of a semiconductor wafer which includes a metallic reporting substance
LSI LOGIC CORP46 citations92
US6541383B1Apr 1, 2003
Apparatus and method for planarizing the surface of a semiconductor wafer
LSI LOGIC CORP6 citations63