Inventor

OGOSE TAIGA

JP3 patents

Patents

3 patents

US12353121B2Jul 8, 2025

Reflective mask blank, and reflective mask

SHINETSU CHEMICAL CO0 citations56

US12124162B2Oct 22, 2024

Substrate with film for reflective mask blank, reflective mask blank, and method for manufacturing reflective mask

SHINETSU CHEMICAL CO1 citations56

US12265321B2Apr 1, 2025

Reflective mask blank, and method for manufacturing reflective mask

SHINETSU CHEMICAL CO0 citations49