Inventor
SONE ICHIRO
JP6 patents
Patents
6 patentsUS12040166B2Jul 16, 2024
Substrate processing apparatus, substrate processing system, and maintenance method
TOKYO ELECTRON LTD3 citations72
US12347660B2Jul 1, 2025
Substrate processing apparatus, substrate processing system, and maintenance method
TOKYO ELECTRON LTD1 citations62
US12377503B2Aug 5, 2025
Part replacement system and part replacement device
TOKYO ELECTRON LTD0 citations59
US12002666B2Jun 4, 2024
Measuring device, measuring method, and vacuum processing apparatus
TOKYO ELECTRON LTD0 citations59
US11992912B2May 28, 2024
Part replacement system and part replacement device
TOKYO ELECTRON LTD0 citations59
US12424423B2Sep 23, 2025
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations50