Inventor

CHERNYAKOV IOSIF

US3 patents

Patents

3 patents

US5976222ANov 2, 1999

Recovery of perfluorinated compounds from the exhaust of semiconductor fabs using membrane and adsorption in series

AIR PROD & CHEM56 citations94

US5730779AMar 24, 1998

Fluorochemical recovery and recycle using membranes

AIR PROD & CHEM47 citations90

US6032484AMar 7, 2000

Recovery of perfluorinated compounds from the exhaust of semiconductor fabs with recycle of vacuum pump diluent

AIR PROD & CHEM11 citations71