Inventor
JEOUNG GYU-CHAN
KR6 patents
Patents
6 patentsUS6503365B1Jan 7, 2003
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
SAMSUNG ELECTRONICS CO LTD569 citations98
US6930050B2Aug 16, 2005
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
SAMSUNG ELECTRONICS CO LTD19 citations92
US6398430B1Jun 4, 2002
Semiconductor device fabrication system
SAMSUNG ELECTRONICS CO LTD19 citations90
US6358672B2Mar 19, 2002
Method of forming semiconductor device pattern including cross-linking and flow baking a positive photoresist
SAMSUNG ELECTRONICS CO LTD24 citations90
US7776226B2Aug 17, 2010
Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
SAMSUNG ELECTRONICS CO LTD1 citations51
US11189467B2Nov 30, 2021
Apparatus and method of attaching pad on edge ring
SAMSUNG ELECTRONICS CO LTD0 citations42