Inventor
MORITA AKIHIKO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MORITA AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
12 patentsUS8003919B2Aug 23, 2011
Substrate heat treatment apparatus
DAINIPPON SCREEN MFG481 citations98
US7432476B2Oct 7, 2008
Substrate heat treatment apparatus
DAINIPPON SCREEN MFG502 citations98
US6260562B1Jul 17, 2001
Substrate cleaning apparatus and method
DAINIPPON SCREEN MFG98 citations98
US6051101AApr 18, 2000
Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus
DAINIPPON SCREEN MFG126 citations97
US6286525B1Sep 11, 2001
Substrate cleaning apparatus and method
DAINIPPON SCREEN MFG67 citations96
US6062852AMay 16, 2000
Substrate heat-treating apparatus
DAINIPPON SCREEN MFG57 citations95
US6869234B2Mar 22, 2005
Developing apparatus and developing method
DAINIPPON SCREEN MFG23 citations92
US6159291ADec 12, 2000
Substrate treating apparatus
DAINIPPON SCREEN MFG47 citations92
US6060697AMay 9, 2000
Substrate processing apparatus having regulated power consumption and method therefor
DAINIPPON SCREEN MFG52 citations92
US5853483ADec 29, 1998
Substrate spin treating method and apparatus
DAINIPPON SCREEN MFG32 citations92
US5881876AMar 16, 1999
Method and vessel for storing a substrate cleaning brush
DAINIPPON SCREEN MFG12 citations71
US7048801B2May 23, 2006
Chemical pump and method of discharging chemical solution
DAINIPPON SCREEN MFG0 citations41