Inventor
IWAMI MASAKI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “IWAMI MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
6 patentsUS6051101AApr 18, 2000
Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus
DAINIPPON SCREEN MFG126 citations97
US5762684AJun 9, 1998
Treating liquid supplying method and apparatus
DAINIPPON SCREEN MFG100 citations96
US6062852AMay 16, 2000
Substrate heat-treating apparatus
DAINIPPON SCREEN MFG57 citations95
US6060697AMay 9, 2000
Substrate processing apparatus having regulated power consumption and method therefor
DAINIPPON SCREEN MFG52 citations92
US7913346B2Mar 29, 2011
Substrate treatment apparatus and substrate treatment method
DAINIPPON SCREEN MFG6 citations62
US7311781B2Dec 25, 2007
Substrate rotation type treatment apparatus
DAINIPPON SCREEN MFG4 citations60
SCREEN HOLDINGS CO LTD
3 patentsUS11804387B2Oct 31, 2023
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations59
US10998203B2May 4, 2021
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations59
US10037902B2Jul 31, 2018
Substrate processing device and substrate processing method
SCREEN HOLDINGS CO LTD0 citations49