Inventor
NISHIMURA JOICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “NISHIMURA JOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
DAINIPPON SCREEN MFG
14 patentsUS6260562B1Jul 17, 2001
Substrate cleaning apparatus and method
DAINIPPON SCREEN MFG98 citations98
US6051101AApr 18, 2000
Substrate processing apparatus, substrate transport apparatus and substrate transfer apparatus
DAINIPPON SCREEN MFG126 citations97
US6286525B1Sep 11, 2001
Substrate cleaning apparatus and method
DAINIPPON SCREEN MFG67 citations96
US6151744ANov 28, 2000
Method of and apparatus for cleaning substrate
DAINIPPON SCREEN MFG55 citations95
US6062852AMay 16, 2000
Substrate heat-treating apparatus
DAINIPPON SCREEN MFG57 citations95
US6896466B2May 24, 2005
Substrate processing apparatus
DAINIPPON SCREEN MFG24 citations92
US6790287B2Sep 14, 2004
Substrate processing apparatus, substrate inspection method and substrate processing system
DAINIPPON SCREEN MFG26 citations92
US6790286B2Sep 14, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG24 citations92
US6371713B1Apr 16, 2002
Substrate processing apparatus
DAINIPPON SCREEN MFG42 citations92
US6159291ADec 12, 2000
Substrate treating apparatus
DAINIPPON SCREEN MFG47 citations92
US6060697AMay 9, 2000
Substrate processing apparatus having regulated power consumption and method therefor
DAINIPPON SCREEN MFG52 citations92
US5860178AJan 19, 1999
Substrate spin cleaning apparatus
DAINIPPON SCREEN MFG20 citations92
US5829087ANov 3, 1998
Substrate spin cleaning apparatus
DAINIPPON SCREEN MFG53 citations92
US7231273B2Jun 12, 2007
Substrate processing apparatus and method including obstacle detection
DAINIPPON SCREEN MFG4 citations60