Inventor
FUNAKOSHI HIDEO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FUNAKOSHI HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS9649577B2May 16, 2017
Bubble removing method, bubble removing apparatus, degassing apparatus, and computer-readable recording medium
TOKYO ELECTRON LTD2 citations68
US10807027B2Oct 20, 2020
Treatment solution supply apparatus and substrate treatment system
TOKYO ELECTRON LTD1 citations61
US7714979B2May 11, 2010
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations61
US7819594B2Oct 26, 2010
Development processing device
TOKYO ELECTRON LTD4 citations60
US7600933B2Oct 13, 2009
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations51