Inventor
NEUREUTHER ANDREW R
US4 patents
Patents
4 patentsUS7030997B2Apr 18, 2006
Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysis
UNIV CALIFORNIA85 citations92
US6686132B2Feb 3, 2004
Method and apparatus for enhancing resist sensitivity and resolution by application of an alternating electric field during post-exposure bake
UNIV CALIFORNIA45 citations86
US7224458B2May 29, 2007
Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems
UNIV CALIFORNIA9 citations71
US7648802B2Jan 19, 2010
Phase shifting test mask patterns for characterizing illumination and mask quality in image forming optical systems
UNIV CALIFORNIA3 citations60