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Inventor
GOU TATSUO
JP
2 patents
Patents
2 patents
US7913221B2
Mar 22, 2011
Interconnect structure of semiconductor integrated circuit, and design method and device therefor
PANASONIC CORP
8 citations
79
US7698671B2
Apr 13, 2010
Method for designing semiconductor integrated circuits having air gaps.
PANASONIC CORP
6 citations
57