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Inventor
KOO KYO-IL
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “KOO KYO-IL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HUANG JENSHENG
1 patent
US8250498B2
Aug 21, 2012
Method and apparatus for calibrating a photolithography process model by using a process window parameter
HUANG JENSHENG
8 citations
79
SAMSUNG ELECTRONICS CO LTD
1 patent
US12223249B2
Feb 11, 2025
Etch-modeling system and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD
0 citations
46