Inventor

YUN GUNSU

US4 patents

⚠️ This page may combine multiple inventors who share the name “YUN GUNSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YUN GUNSU

2 patents

US8340827B2Dec 25, 2012

Methods for controlling time scale of gas delivery into a processing chamber

YUN GUNSU29 citations86

US8989888B2Mar 24, 2015

Automatic fault detection and classification in a plasma processing system and methods thereof

YUN GUNSU7 citations79

CHOI BRIAN

1 patent

US8650002B2Feb 11, 2014

Determining plasma processing system readiness without generating plasma

CHOI BRIAN3 citations54

CHOI BRIAN D

1 patent

US8295966B2Oct 23, 2012

Methods and apparatus to predict etch rate uniformity for qualification of a plasma chamber

CHOI BRIAN D2 citations52