Inventor
UMEMOTO MASAO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “UMEMOTO MASAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS9216442B2Dec 22, 2015
Gas-liquid separator and polishing apparatus
EBARA CORP4 citations72
US9174324B2Nov 3, 2015
Polishing apparatus with polishing head cover
EBARA CORP4 citations72
US9409277B2Aug 9, 2016
Polishing apparatus and polishing method
EBARA CORP4 citations68
US9522453B2Dec 20, 2016
Polishing apparatus
EBARA CORP2 citations61
US9764446B2Sep 19, 2017
Rotary joint and polishing apparatus
EBARA CORP0 citations40