Inventor
SONE TADAKAZU
JP28 patents
⚠️ This page may combine multiple inventors who share the name “SONE TADAKAZU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
25 patentsUS6435949B1Aug 20, 2002
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof
EBARA CORP71 citations96
US6969305B2Nov 29, 2005
Polishing apparatus
EBARA CORP16 citations84
US6783427B2Aug 31, 2004
Polishing system with air exhaust system
EBARA CORP9 citations73
US11007621B2May 18, 2021
Polishing apparatus and polishing method
EBARA CORP3 citations72
US9216442B2Dec 22, 2015
Gas-liquid separator and polishing apparatus
EBARA CORP4 citations72
US9174324B2Nov 3, 2015
Polishing apparatus with polishing head cover
EBARA CORP4 citations72
US9409277B2Aug 9, 2016
Polishing apparatus and polishing method
EBARA CORP4 citations68
US6824454B2Nov 30, 2004
Polishing apparatus
EBARA CORP5 citations63
US11612983B2Mar 28, 2023
Polishing apparatus and polishing method
EBARA CORP0 citations62
US11472002B2Oct 18, 2022
Substrate polishing apparatus
EBARA CORP0 citations62
US9522453B2Dec 20, 2016
Polishing apparatus
EBARA CORP2 citations61
US11980998B2May 14, 2024
Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid
EBARA CORP0 citations52
US11839948B2Dec 12, 2023
Polishing apparatus
EBARA CORP0 citations52
US10576604B2Mar 3, 2020
Substrate polishing apparatus
EBARA CORP0 citations51
US9724798B2Aug 8, 2017
Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus
EBARA CORP0 citations51
US9530704B2Dec 27, 2016
Polishing apparatus and wear detection method
EBARA CORP0 citations51
US9144878B2Sep 29, 2015
Polishing apparatus and wear detection method
EBARA CORP1 citations51
US9028297B2May 12, 2015
Polishing apparatus
EBARA CORP0 citations51
US12179312B2Dec 31, 2024
Apparatus for polishing, processing system, and method of polishing
EBARA CORP0 citations50
US10987776B2Apr 27, 2021
Calibration method and non-transitory computer-readable storage medium storing a program of calibration
EBARA CORP0 citations49
US11642755B2May 9, 2023
Apparatus for polishing and method for polishing
EBARA CORP0 citations48
US11465256B2Oct 11, 2022
Apparatus for polishing and method for polishing
EBARA CORP0 citations48
US10730162B2Aug 4, 2020
Turntable cloth peeling jig
EBARA CORP0 citations41
US9666469B2May 30, 2017
Lifting device, substrate processing apparatus having lifting device, and unit transferring method
EBARA CORP0 citations41
US9764446B2Sep 19, 2017
Rotary joint and polishing apparatus
EBARA CORP0 citations40