P

Inventor

AIZAWA HIDEO

JP41 patents
⚠️ This page may combine multiple inventors who share the name “AIZAWA HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

21 patents
US6036582AMar 14, 2000

Polishing apparatus

EBARA CORP61 citations96
US6939208B2Sep 6, 2005

Polishing apparatus

EBARA CORP42 citations95
US7063598B2Jun 20, 2006

Substrate delivery mechanism

EBARA CORP19 citations92
US7040968B2May 9, 2006

Polishing apparatus

EBARA CORP28 citations92
US6783445B2Aug 31, 2004

Polishing apparatus

EBARA CORP22 citations92
US6835116B2Dec 28, 2004

Polishing apparatus

EBARA CORP17 citations82
US6116994ASep 12, 2000

Polishing apparatus

EBARA CORP9 citations74
US7645185B2Jan 12, 2010

Substrate delivery mechanism

EBARA CORP5 citations73
US7083506B2Aug 1, 2006

Polishing apparatus

EBARA CORP6 citations73
US9216442B2Dec 22, 2015

Gas-liquid separator and polishing apparatus

EBARA CORP4 citations72
US9174324B2Nov 3, 2015

Polishing apparatus with polishing head cover

EBARA CORP4 citations72
US9409277B2Aug 9, 2016

Polishing apparatus and polishing method

EBARA CORP4 citations68
US11472002B2Oct 18, 2022

Substrate polishing apparatus

EBARA CORP0 citations62
US11103972B2Aug 31, 2021

Buff processing device and substrate processing device

EBARA CORP0 citations62
US7207864B2Apr 24, 2007

Polishing apparatus

EBARA CORP4 citations62
US7160180B2Jan 9, 2007

Substrate delivery mechanism

EBARA CORP3 citations62
US9522453B2Dec 20, 2016

Polishing apparatus

EBARA CORP2 citations61
US10576604B2Mar 3, 2020

Substrate polishing apparatus

EBARA CORP0 citations51
US9724798B2Aug 8, 2017

Cover for component of polishing apparatus, component of polishing apparatus, and polishing apparatus

EBARA CORP0 citations51
US9666469B2May 30, 2017

Lifting device, substrate processing apparatus having lifting device, and unit transferring method

EBARA CORP0 citations41
US9764446B2Sep 19, 2017

Rotary joint and polishing apparatus

EBARA CORP0 citations40

TOSHIBA KK

6 patents

DENSO CORP

4 patents

NISSAN MOTOR

3 patents

AIZAWA HIDEO

3 patents

HONDA MOTOR CO LTD

2 patents

RICOH KK

1 patent

ALPINE ELECTRONICS INC

1 patent