Inventor
KOSUGE RYUICHI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “KOSUGE RYUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
18 patentsUS7837534B2Nov 23, 2010
Apparatus for heating or cooling a polishing surface of a polishing apparatus
EBARA CORP26 citations92
US8382558B2Feb 26, 2013
Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
EBARA CORP14 citations83
US7850817B2Dec 14, 2010
Polishing device and substrate processing device
EBARA CORP15 citations83
US9434044B2Sep 6, 2016
Polishing apparatus
EBARA CORP8 citations79
US9174324B2Nov 3, 2015
Polishing apparatus with polishing head cover
EBARA CORP4 citations72
US9409277B2Aug 9, 2016
Polishing apparatus and polishing method
EBARA CORP4 citations68
US11433502B2Sep 6, 2022
Polishing table and polishing apparatus having ihe same
EBARA CORP0 citations62
US10816259B2Oct 27, 2020
Substrate transport apparatus, substrate processing apparatus, and dew condensation suppression method
EBARA CORP1 citations62
US9522453B2Dec 20, 2016
Polishing apparatus
EBARA CORP2 citations61
US10926374B2Feb 23, 2021
Substrate processing apparatus
EBARA CORP0 citations59
US11980998B2May 14, 2024
Polishing device, polishing method, and recording medium for recording program for determining supply position of polishing liquid
EBARA CORP0 citations52
US11839948B2Dec 12, 2023
Polishing apparatus
EBARA CORP0 citations52
US10661411B2May 26, 2020
Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface
EBARA CORP0 citations51
US9530704B2Dec 27, 2016
Polishing apparatus and wear detection method
EBARA CORP0 citations51
US9144878B2Sep 29, 2015
Polishing apparatus and wear detection method
EBARA CORP1 citations51
US9028297B2May 12, 2015
Polishing apparatus
EBARA CORP0 citations51
US10157762B2Dec 18, 2018
Substrate processing apparatus and substrate presence or absence checking method and program
EBARA CORP0 citations49
US9764446B2Sep 19, 2017
Rotary joint and polishing apparatus
EBARA CORP0 citations40