Inventor
GUT GEORGE M
US3 patents
Patents
3 patentsUS5877094AMar 2, 1999
Method for fabricating a silicon-on-sapphire wafer
IBM35 citations88
US6238935B1May 29, 2001
Silicon-on-insulator wafer having conductive layer for detection with electrical sensors
IBM14 citations69
US4810322AMar 7, 1989
Anode plate for a parallel-plate reactive ion etching reactor
IBM17 citations68