Inventor

GARLING LISA K

US3 patents

Patents

3 patents

US5580815ADec 3, 1996

Process for forming field isolation and a structure over a semiconductor substrate

MOTOROLA INC74 citations93

US5707889AJan 13, 1998

Process for forming field isolation

MOTOROLA INC21 citations91

US5175117ADec 29, 1992

Method for making buried isolation

MOTOROLA INC2 citations61