Inventor
UESAWA FUMIKATSU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “UESAWA FUMIKATSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SONY CORP
5 patentsUS5397663AMar 14, 1995
Phase shift mask and method of manufacturing the same
SONY CORP20 citations91
US6953746B2Oct 11, 2005
Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width
SONY CORP13 citations80
US6716747B2Apr 6, 2004
Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width
SONY CORP1 citations59
US7517638B2Apr 14, 2009
Method of manufacturing a semiconductor apparatus with a tapered aperture pattern to form a predetermined line width
SONY CORP0 citations48
US6177233B1Jan 23, 2001
Method of forming resist pattern
SONY CORP1 citations48