Inventor
PRICE JASON
US4 patents
⚠️ This page may combine multiple inventors who share the name “PRICE JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
2 patentsUS7029382B2Apr 18, 2006
Apparatus for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP17 citations89
US7311586B2Dec 25, 2007
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP13 citations81