Inventor
CHARIF MALIK
US2 patents
Patents
2 patentsUS7029382B2Apr 18, 2006
Apparatus for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP17 citations89
US7311586B2Dec 25, 2007
Apparatus and method for chemical-mechanical polishing (CMP) head having direct pneumatic wafer polishing pressure
EBARA CORP13 citations81