Inventor
PARK HWAN-SHIK
KR5 patents
⚠️ This page may combine multiple inventors who share the name “PARK HWAN-SHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
3 patentsUS7375003B2May 20, 2008
Methods of manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD2 citations60
US7197426B2Mar 27, 2007
Method and apparatus for measuring thickness of metal layer
SAMSUNG ELECTRONICS CO LTD3 citations60
US7355729B2Apr 8, 2008
Apparatus and method for measuring a thickness of a substrate
SAMSUNG ELECTRONICS CO LTD1 citations49