Inventor
HSIEH HONG-CHANG
TW5 patents
Patents
5 patentsUS7906252B2Mar 15, 2011
Multiple resist layer phase shift mask (PSM) blank and PSM formation method
TAIWAN SEMICONDUCTOR MFG9 citations81
US6316152B1Nov 13, 2001
OPC method to improve e-beam writing time
TAIWAN SEMICONDUCTOR MFG5 citations61
US7314689B2Jan 1, 2008
System and method for processing masks with oblique features
TAIWAN SEMICONDUCTOR MFG2 citations60
US6348288B1Feb 19, 2002
Resolution enhancement method for deep quarter micron technology
TAIWAN SEMICONDUCTOR MFG4 citations60
US7460251B2Dec 2, 2008
Dimension monitoring method and system
TAIWAN SEMICONDUCTOR MFG0 citations48