Inventor
BONNER BENJAMIN A
US11 patents
⚠️ This page may combine multiple inventors who share the name “BONNER BENJAMIN A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS6855043B1Feb 15, 2005
Carrier head with a modified flexible membrane
APPLIED MATERIALS INC33 citations92
US6561381B1May 13, 2003
Closed loop control over delivery of liquid material to semiconductor processing tool
APPLIED MATERIALS INC34 citations92
US6220941B1Apr 24, 2001
Method of post CMP defect stability improvement
APPLIED MATERIALS INC35 citations92
US6811470B2Nov 2, 2004
Methods and compositions for chemical mechanical polishing shallow trench isolation substrates
APPLIED MATERIALS INC20 citations90
US6251001B1Jun 26, 2001
Substrate polishing with reduced contamination
APPLIED MATERIALS INC21 citations90
US6834777B2Dec 28, 2004
Closed loop control over delivery of liquid material to semiconductor processing tool
APPLIED MATERIALS INC14 citations83
US7601050B2Oct 13, 2009
Polishing apparatus with grooved subpad
APPLIED MATERIALS INC11 citations82
US7179159B2Feb 20, 2007
Materials for chemical mechanical polishing
APPLIED MATERIALS INC8 citations71
US6361405B1Mar 26, 2002
Utility wafer for chemical mechanical polishing
APPLIED MATERIALS INC10 citations71
US7429210B2Sep 30, 2008
Materials for chemical mechanical polishing
APPLIED MATERIALS INC3 citations60