Inventor
NANAO TSUBASA
JP6 patents
Patents
6 patentsUS10388488B2Aug 20, 2019
Multi charged particle beam drawing apparatus and multi charged particle beam drawing method
NUFLARE TECHNOLOGY INC2 citations70
US11804360B2Oct 31, 2023
Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC0 citations60
US11740546B2Aug 29, 2023
Multi charged particle beam writing apparatus and method of adjusting same
NUFLARE TECHNOLOGY INC0 citations49
US10042261B2Aug 7, 2018
Method of aperture alignment and multi charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations46
US10157723B2Dec 18, 2018
Multi charged particle beam writing apparatus and method of adjusting the same
NUFLARE TECHNOLOGY INC0 citations37
US10490388B2Nov 26, 2019
Multibeam-focus adjusting method, multibeam-focus measuring method, and charged-particle-beam lithography apparatus
NUFLARE TECHNOLOGY INC0 citations35