Inventor
KALLAKURI SHANTANU
US4 patents
Patents
4 patentsUS11749564B2Sep 5, 2023
Techniques for void-free material depositions
APPLIED MATERIALS INC2 citations70
US12131948B2Oct 29, 2024
Techniques for void-free material depositions
APPLIED MATERIALS INC0 citations60
US11956978B2Apr 9, 2024
Techniques and device structure based upon directional seeding and selective deposition
APPLIED MATERIALS INC1 citations59
US11404314B2Aug 2, 2022
Metal line patterning
APPLIED MATERIALS INC0 citations59