Inventor

CHENG HSIANG-SHENG

TW2 patents

Patents

2 patents

US6776850B2Aug 17, 2004

Preventative maintenance aided tool for CVD chamber

TAIWAN SEMICONDUCTOR MFG16 citations79

US6483082B1Nov 19, 2002

Heater lift lead screw for vertical furnaces

TAIWAN SEMICONDUCTOR MFG12 citations69