Inventor

SOLTANI BAHMAN

JP3 patents

Patents

3 patents

US12417909B2Sep 16, 2025

Surface processing apparatus and surface processing method for SiC substrate

DENSO CORP0 citations57

US11795576B2Oct 24, 2023

Production method of silicon carbide wafer, production method of semiconductor substrate, and production method of silicon carbide semiconductor device

DENSO CORP0 citations51

US12330340B2Jun 17, 2025

Method of manufacturing semiconductor wafers

DENSO CORP0 citations32