P

Inventor

TANIGAWA OSAMU

JP10 patents
⚠️ This page may combine multiple inventors who share the name “TANIGAWA OSAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents
US6390754B2May 21, 2002

Wafer processing apparatus, method of operating the same and wafer detecting system

TOKYO ELECTRON LTD467 citations98
US6302927B1Oct 16, 2001

Method and apparatus for wafer processing

TOKYO ELECTRON LTD55 citations94
US5915957AJun 29, 1999

Method of transferring target substrates in semiconductor processing system

TOKYO ELECTRON LTD30 citations91
US6902369B2Jun 7, 2005

Elevating mechanism, carrier conveying apparatus and heat treatment installation

TOKYO ELECTRON LTD11 citations72
US6499933B2Dec 31, 2002

Elevating mechanism, carrier conveying apparatus and heat treatment installation

TOKYO ELECTRON LTD3 citations61

BROTHER IND LTD

3 patents
US5302061AApr 12, 1994

Door opening and closing device using a robot

BROTHER IND LTD25 citations88
US6435232B2Aug 20, 2002

Coolant passage connecting apparatus for a machine tool

BROTHER IND LTD7 citations72
US6835031B2Dec 28, 2004

Machine tool having an improved cover

BROTHER IND LTD2 citations61

KAWASAKI STEEL CO

1 patent
US5266417ANov 30, 1993

Low-temperature service nickel plate with excellent weld toughness

KAWASAKI STEEL CO2 citations61

ISHIKAWAJIMA HARIMA HEAVY IND

1 patent
US6537391B2Mar 25, 2003

Steel with improved impact penetration resistance and method for producing the same

ISHIKAWAJIMA HARIMA HEAVY IND0 citations44