Inventor

ABIRU AKIRA

JP2 patents

Patents

2 patents

US4770680ASep 13, 1988

Wafer carrier for a semiconductor device fabrication, having means for sending clean air stream to the wafers stored therein

FUJITSU LTD31 citations86

US4426657AJan 17, 1984

Semiconductor device and method for producing same

FUJITSU LTD22 citations78