Inventor
SENGA TATSUYA
JP8 patents
⚠️ This page may combine multiple inventors who share the name “SENGA TATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6749714B1Jun 15, 2004
Polishing body, polisher, polishing method, and method for producing semiconductor device
NIKON CORP66 citations95
US6458014B1Oct 1, 2002
Polishing body, polishing apparatus, polishing apparatus adjustment method, polished film thickness or polishing endpoint measurement method, and semiconductor device manufacturing method
NIKON CORP125 citations94
US6520895B2Feb 18, 2003
Polishing device and polishing pad component exchange device and method
NIKON CORP22 citations92
US7686673B2Mar 30, 2010
Working shape prediction method, working requirement determination method, working method, working system, method of manufacturing semiconductor device, computer program, and computer program storage medium
NIKON CORP5 citations73
US7203564B2Apr 10, 2007
Treatment condition decision method, treatment condition decision system, treatment system, treatment condition decision calculator program, program recording medium, and semiconductor device manufacturing method
NIKON CORP0 citations51
US9046279B2Jun 2, 2015
Light condensing device, photovoltaic power generation device and photo-thermal conversion device
NIKON CORP0 citations31