Inventor
SCHELLER GEOFFREY R
US3 patents
Patents
3 patentsUS5002631AMar 26, 1991
Plasma etching apparatus and method
AT & T BELL LAB80 citations94
US5326626AJul 5, 1994
Stable polar optically nonlinear multilayer films and devices using the same
AT & T BELL LAB12 citations71
US5217792AJun 8, 1993
Stable polar optically nonlinear multilayer films and devices using the same
AT & T BELL LAB16 citations71